Low-Temperature Processing of PZT-PMN Thin Film by Sol-Gel Casting
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چکیده
منابع مشابه
Processing Sol-gel Pzt Thin Films for Microactuators
Sol-gel derived lead zirconate titanate (PZT) thin films are being investigated for micromechanical applications. A synthesis technique which involves the spin coating of several thin layers followed by rapid thermal annealing to crystallize the perovskite phase and repetition to achieve thicker films is described. Methods of improving the PZT-PZT interfaces between subsequently annealed layers...
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ژورنال
عنوان ژورنال: Journal of the Society of Powder Technology, Japan
سال: 2005
ISSN: 0386-6157,1883-7239
DOI: 10.4164/sptj.42.396